A method to correct hysteresis of scanning probe microscope images based on a sinusoidal model

Area of Science:

• Materials Science
• Instrumentation
• Nanotechnology

Background:

• Piezoelectric actuators are crucial for scanning probe microscopes (SPMs) but exhibit hysteresis, degrading image accuracy.
• This hysteresis causes distortions in SPM images, particularly during repetitive raster scanning.
• Accurate positioning is essential for high-resolution imaging in techniques like atomic force microscopy (AFM).

Purpose of the Study:

• To develop a practical mathematical model for describing and correcting hysteresis in piezoelectric actuators during repeated scanning.
• To improve the positioning accuracy and reduce image distortion in SPM, specifically AFM.
• To provide a cost-effective and easily integrated solution for hysteresis correction.

Main Methods:

• A novel mathematical model combining sinusoidal and linear functions was proposed to represent piezoelectric actuator hysteresis.
• Model parameters were determined using matched feature points from trace and retrace AFM images of a standard sample.
• The model was applied to correct hysteresis in AFM images acquired with varying scanning frequencies and ranges.

Main Results:

• Hysteresis in scanned images was reduced from 107.46 pixels to 2.50 pixels over an 800-pixel width after correction.
• The model effectively corrected hysteresis across different scanning frequencies and ranges.
• The correction method demonstrated significant improvement in image fidelity and positioning accuracy.

Conclusions:

• The proposed mathematical model offers an effective and simple solution for correcting piezoelectric actuator hysteresis in AFM.
• This method eliminates the need for expensive displacement sensors or specialized calibration samples.
• The model is easily integrated into existing AFM scanning software without hardware modifications, enhancing accessibility.