Related Experiment Video
Updated: Jan 28, 2026
10:39
Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
10.1K
In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array.
V G Badami1, E Abruña1, L Huang2
1Zygo Corporation, 21 Laurel Brook Road, Middlefield, Connecticut 06455, USA.
The Review of Scientific Instruments
|March 6, 2019
Summary
This study introduces a new method for real-time measurement of adaptive x-ray mirror shapes using interferometric sensors. This non-disruptive technique ensures high accuracy for advanced x-ray light sources.
Area of Science:
- Optics and photonics
- Materials science
- X-ray instrumentation
Background:
- Next-generation x-ray light sources require high-performance adaptive optics.
- Current adaptive x-ray mirror metrology relies on open-loop systems with invasive sensors.
- Existing methods provide intermittent feedback, limiting real-time performance optimization.
Purpose of the Study:
- To develop a novel, real-time, in situ metrology system for adaptive x-ray mirrors.
- To enable non-disruptive measurement of mirror shape without interrupting the x-ray beam.
- To improve the performance and control of adaptive x-ray optics.
Main Methods:
- Design and implementation of an array of interferometric sensors for metrology.
- Utilizing a proof-of-principle demonstration to validate the system.
- Comparison of measurements with a large-aperture Fizeau interferometer.
Main Results:
- Demonstration of sub-nanometer agreement in mirror shape measurements.
- Validation across a range of mirror deflection magnitudes and shapes.
- Successful non-disruptive, real-time metrology of adaptive x-ray mirrors.
Conclusions:
- The proposed interferometric sensor array offers accurate, real-time metrology for adaptive x-ray mirrors.
- This technology can significantly enhance the performance of future x-ray light sources.
- The non-invasive approach overcomes limitations of current metrology techniques.
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