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Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz

Dmitry Morozov1, Simon M Doyle2, Archan Banerjee1

  • 11School of Engineering, University of Glasgow, Glasgow, UK.

Journal of Low Temperature Physics
|March 7, 2019
PubMed

Keywords:
ALDKinetic inductance detectorTitanium nitride

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