Dynamic pH Sensor with Embedded Calibration Scheme by Advanced CMOS FinFET Technology.

Area of Science:

• Materials Science
• Electrical Engineering
• Sensor Technology

Background:

• Traditional pH sensors often lack integration capabilities and adjustable sensitivity.
• Advanced semiconductor manufacturing processes offer potential for novel sensor designs.

Purpose of the Study:

• To present a novel pH sensor utilizing Complementary Metal-Oxide Semiconductor (CMOS) Fin Field-Effect Transistor (FinFET) technology.
• To demonstrate the sensor's adjustable sensitivity, wide sensing range, and multi-pad capabilities.

Main Methods:

• Fabrication of a laterally coupled structure using CMOS FinFET processes.
• Implementation of a self-balanced readout scheme and associated circuitry.
• Performance evaluation through transient response and noise analysis.

Main Results:

• The developed sensor exhibits adjustable sensitivity and a wide sensing range.
• The sensor is compatible with advanced CMOS technologies and can be integrated into integrated circuits (ICs).
• Embedded calibration ensures reliable and stable sensing by mitigating process variations.

Conclusions:

• The novel CMOS FinFET pH sensor offers a robust and versatile solution for integrated sensing applications.
• The sensor's design facilitates easy integration into sensor arrays and advanced electronic systems.
• The technology provides a pathway for developing next-generation, high-performance chemical sensors.