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Investigation of Nitridation on the Band Alignment at MoS2/HfO2 Interfaces

Ya-Wei Huan1, Wen-Jun Liu2, Xiao-Bing Tang1

  • 1State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China.

Nanoscale Research Letters
|May 31, 2019
PubMed

Keywords:
Band alignmentFew-layer MoS2Nitridation treatment

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