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    This study introduces an effective one-dimensional ion-beam figuring (1D-IBF) method for ultra-precision optics. The novel approach achieves sub-nanometer surface accuracy for flat and spherical mirrors without increasing roughness.

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    Area of Science:

    • Optics and Photonics
    • Materials Science and Engineering
    • Manufacturing and Industrial Engineering

    Background:

    • Ultra-precision optical surfaces are critical for advanced optical systems.
    • Ion-beam figuring (IBF) is a key technique for achieving sub-nanometer surface precision.
    • Existing IBF methods face challenges with coordinate system alignment and error propagation.

    Purpose of the Study:

    • To develop an effective one-dimensional ion-beam figuring (1D-IBF) method for ultra-precision flat and spherical mirrors.
    • To achieve sub-nanometer root mean square (RMS) convergence in surface finishing.
    • To address challenges in coordinate system alignment, dwell time calculation, and translation stage errors.

    Main Methods:

    • Integrated mirror holder for precise coordinate system alignment between metrology and IBF hardware.
    • Constrained linear least-squares (CLLS) dwell time calculation algorithm with a coarse-to-fine scheme.
    • Dwell time slicing strategy to mitigate errors from translation stage inaccuracies.

    Main Results:

    • Achieved sub-nanometer RMS residual profile errors on both flat and spherical mirrors.
    • Demonstrated that surface roughness is not adversely affected by the 1D-IBF process.
    • Validated the effectiveness of the integrated mirror holder, CLLS algorithm, and dwell time slicing.

    Conclusions:

    • The proposed 1D-IBF method offers an effective solution for fabricating 1D high-precision optics.
    • The sub-nanometer convergence demonstrates the potential of the developed techniques for advanced optical manufacturing.
    • The method successfully addresses key challenges in IBF, paving the way for improved precision optics production.