Silicon Photonic MEMS Phase-Shifter

Area of Science:

• Photonics
• Micro-Electro-Mechanical Systems (MEMS)
• Integrated Optics

Background:

• Analog phase shifters are crucial components in optical communication systems.
• Silicon photonics offers a scalable platform for integrated optical devices.
• MEMS technology provides a viable method for realizing tunable optical components.

Purpose of the Study:

• To design and simulate a novel analog phase shifter utilizing Silicon Photonic MEMS technology.
• To investigate the operational principle based on electrostatic actuation for precise gap tuning.
• To evaluate the performance metrics including phase shift, actuation voltage, and insertion loss.

Main Methods:

• A two-step parallel plate electrostatic actuation mechanism was employed.
• A vertically movable suspended tapered waveguide was integrated with a fixed bus waveguide.
• The vertical gap between waveguides was tuned to modulate the phase of the coupled optical mode.

Main Results:

• Simulations predicted a π phase shift achievable with 19 V actuation voltage and 19 nm displacement.
• Low insertion loss below 0.3 dB was maintained across a wide wavelength range (1.5 μm to 1.6 μm).
• Adiabatic coupler geometry facilitated efficient optical coupling between waveguides.

Conclusions:

• The proposed Silicon Photonic MEMS design offers an effective solution for analog phase shifting.
• The device demonstrates potential for low-loss, wide-wavelength operation.
• This technology advancement contributes to the development of tunable integrated photonic circuits.