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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
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Analysis of the atomic force microscopy vibration behavior using the Timoshenko theory by multi-scale method in the
A H Korayem1, F Imani1, Moharram H Korayem1
1Robotic Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran.
Microscopy Research and Technique
|July 23, 2019
Summary
This study models piezoelectric micro-cantilever vibrations using the Timoshenko theory and multi-scale method. Interferential forces reduce amplitude and resonance frequency, with simulations validated by atomic force microscopy experiments.
Area of Science:
- Mechanical Engineering
- Materials Science
- Nanotechnology
Background:
- Piezoelectric micro-cantilevers (MC) are crucial for micro-scale sensing applications.
- Understanding their dynamic behavior under various forces is essential for accurate performance.
- Existing models often require comparison with advanced simulation techniques.
Purpose of the Study:
- To model and simulate the vibration behavior of piezoelectric micro-cantilevers (MC) using Timoshenko theory and the multi-scale (MTS) method.
- To analyze the dynamical modes, including non-contact and tapping modes, influenced by surface interaction forces.
- To investigate the impact of interferential forces on amplitude and resonance frequency, and to validate simulation results with experimental data.
Main Methods:
- Modeling and simulation of piezoelectric MC vibration based on Timoshenko beam theory.
- Application of the multi-scale (MTS) method for dynamic analysis in an air environment.
- Investigation of interferential forces (van der Waals, capillary, contact) and their effects.
- Simulation of surface topography for different roughness types.
- Experimental validation using atomic force microscopy (AFM) in amplitude mode.
Main Results:
- Interferential forces applied to the probe tip were found to reduce both the amplitude and resonance frequency of the piezoelectric MC.
- Simulations accurately predicted surface topography for rectangular and wedge-shaped roughness in non-contact and tapping modes.
- Experimental results for the NSC15 Cantilever showed a first natural frequency of 295.85 kHz, with a simulation error of 0.09% compared to the practical result of 296.12 kHz.
- The study quantified nonlinear effects using the γf coefficient and examined the influence of piezoelectric dimensions on it.
Conclusions:
- The MTS method combined with Timoshenko theory provides an accurate approach for simulating piezoelectric MC dynamics.
- Surface interaction forces significantly impact the vibrational characteristics of MCs, necessitating their inclusion in models.
- Experimental validation confirms the reliability of the proposed simulation methodology for micro-cantilever-based sensing applications.
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