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Development of a Novel Three Degrees-of-Freedom Rotary Vibration-Assisted Micropolishing System Based on

Yan Gu1, Xiuyuan Chen2, Faxiang Lu2

  • 1School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. guyan@ccut.edu.cn.

Micromachines
|August 1, 2019
PubMed

Keywords:
finite element analysisnonresonant micropolishingsilicon carbide (SiC) ceramicvibration-assisted processing device (VPD)

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