Related Experiment Video
Updated: Jan 5, 2026

15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
6.5K
Pyrolytic carbon resonators for micromechanical thermal analysis
Long Quang Nguyen1,2, Peter Emil Larsen1,3, Tom Larsen4
11DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs Lyngby, Denmark.
Microsystems & Nanoengineering
|October 25, 2019
Summary
Pyrolytic carbon resonators enable micromechanical thermal analysis (MTA) using nanogram samples, overcoming limitations of traditional methods. This innovation accurately determines polymer transition temperatures like glass transition temperature (Tg) and melting temperature (Tm).
Area of Science:
- Materials Science
- Polymer Science
- Analytical Chemistry
Background:
- Traditional thermal analysis methods require substantial sample amounts, limiting applications for precious or scarce materials.
- Developing microscale analytical techniques is crucial for efficient material characterization.
Purpose of the Study:
- To introduce pyrolytic carbon resonators for micromechanical thermal analysis (MTA) of polymer and drug samples.
- To demonstrate the capability of these resonators to analyze nanogram quantities of materials.
Main Methods:
- Fabrication of doubly clamped, pre-stressed pyrolytic carbon beams with specific resonance frequencies and Q factors.
- Utilizing optimized electrical conductivity for integrated resistive heating and temperature control.
- Monitoring resonance frequency and Q factor changes with temperature to determine material properties.
Main Results:
- Successfully fabricated pyrolytic carbon resonators suitable for MTA.
- Accurately determined the glass transition temperature (Tg) of poly(L-lactic acid) (PLLA) at 61.0 ± 0.8 °C.
- Accurately determined the melting temperature (Tm) of poly(caprolactone) (PCL) at 60.0 ± 1.0 °C.
- Results showed excellent agreement with differential scanning calorimetry (DSC) measurements.
Conclusions:
- Pyrolytic carbon resonators are effective tools for micromechanical thermal analysis (MTA) of small sample sizes.
- This technique offers a sensitive and accurate alternative for characterizing polymers and drugs.
- The method holds promise for advancing material analysis with minimal sample consumption.

