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    This study introduces an absolute optical encoder achieving 10 nm positioning repeatability. The novel design uses a unique scale grating and a two-probe reading head for precise motion control.

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    Area of Science:

    • Metrology
    • Optical Engineering
    • Nanotechnology

    Background:

    • Accurate position sensing is critical in advanced manufacturing and scientific instrumentation.
    • Existing optical encoders face limitations in achieving both absolute positioning and nanometric repeatability.
    • Developing high-precision encoders is essential for next-generation measurement systems.

    Purpose of the Study:

    • To introduce and investigate a novel absolute optical encoder.
    • To achieve nanometric positioning repeatability for precise motion control.
    • To demonstrate the encoder's performance over a significant motion range.

    Main Methods:

    • Design of an improved scale grating with superimposed distance marks.
    • Development of a compact two-probe reading head for simultaneous position and displacement sensing.
    • Utilizing grating interferometry with high-quality sinusoidal signals for accurate mark localization and nanometer-scale displacement measurement.

    Main Results:

    • The encoder demonstrates nanometric positioning repeatability, reaching 10 nm.
    • Achieved high-quality sinusoidal signals from grating interferometry with stable 100-subdivision phase information.
    • The system accurately locates marks on the scale grating.

    Conclusions:

    • The developed absolute optical encoder offers superior positioning repeatability.
    • The innovative design integrating scale marks and grating grooves enables simultaneous absolute position and high-resolution displacement sensing.
    • This technology has the potential to advance precision measurement applications.