CALIBRATION OF A TABLETOP CONFOCAL MICROBEAM X-RAY FLUORESCENCE SPECTROMETER FOR A QUANTITATIVE DEPTH PROFILES

Radek Prokeš1, Tomáš Trojek1

  • 1Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering, Břehová 7, 115 19 Prague, Czech Republic.

Summary

This study details the calibration of a laboratory confocal micro-X-ray fluorescence (micro-XRF) setup. Calibration ensures accurate, three-dimensional elemental analysis of sample composition.