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Synchrotron X-ray Microdiffraction and Fluorescence Imaging of Mineral and Rock Samples
Published on: June 19, 2018
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CALIBRATION OF A TABLETOP CONFOCAL MICROBEAM X-RAY FLUORESCENCE SPECTROMETER FOR A QUANTITATIVE DEPTH PROFILES
1Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering, Břehová 7, 115 19 Prague, Czech Republic.
Radiation Protection Dosimetry
|December 18, 2019
Summary
This study details the calibration of a laboratory confocal micro-X-ray fluorescence (micro-XRF) setup. Calibration ensures accurate, three-dimensional elemental analysis of sample composition.
Area of Science:
- Analytical Chemistry
- Materials Science
- Physics
Background:
- Confocal micro-X-ray fluorescence (micro-XRF) offers non-destructive, 3D elemental analysis.
- Accurate calibration is crucial for quantitative micro-XRF measurements.
- A new tabletop micro-XRF spectrometer was developed at CTU in Prague.
Purpose of the Study:
- To describe a comprehensive calibration procedure for a laboratory confocal micro-XRF setup.
- To determine the characteristic parameters of the spectrometer.
- To lay the groundwork for quantitative depth profile analysis.
Main Methods:
- Calculation of the excitation spectrum.
- Experimental determination of energy-dependent confocal volume.
- Measurement of integral sensitivity.
- Calculation of the spectrometer sensitivity function.
Main Results:
- The calibration procedure successfully characterized the confocal micro-XRF setup.
- Key parameters including energy-dependent volume and sensitivity were determined.
- The methodology provides a foundation for quantitative depth profiling.
Conclusions:
- The described calibration procedure is essential for accurate quantitative analysis using confocal micro-XRF.
- The calibrated setup enables reliable three-dimensional elemental composition investigation.
- This work facilitates the development of advanced quantitative depth profiling techniques.

