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Fluorine Gas Coinjection as a Solution for Enhancing Spatial Resolution of Time-of-Flight Secondary Ion Mass

Agnieszka Priebe1, Laszlo Pethö1, Johann Michler1

  • 1Laboratory for Mechanics of Materials and Nanostructures , Empa, Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland.

Analytical Chemistry
|December 21, 2019
PubMed

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