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Updated: Dec 27, 2025

Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds
Published on: December 2, 2013
Improved contacts to p-type MoS2 transistors by charge-transfer doping and contact engineering
Siyuan Zhang1,2, Son T Le1,2, Curt A Richter2
1Theiss Research, La Jolla, California 92037, USA.
Achieving p-type behavior in molybdenum disulfide (MoS2) transistors is possible through chemical doping and palladium contacts. This breakthrough enables high-performance 2D electronics and complementary circuits.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Monolayer molybdenum disulfide (ML MoS2) typically exhibits n-type semiconductor behavior due to intrinsic band structure and Fermi level pinning.
- Controlling the conductivity type is crucial for developing advanced electronic devices.
Purpose of the Study:
- To investigate the combined effects of molecular doping and contact engineering on the transport and contact properties of ML MoS2.
- To achieve significant p-type (hole-transport) behavior in ML MoS2 devices.
Main Methods:
- Fabrication of ML MoS2 field-effect transistors.
- Application of chemical doping treatments.
- Engineering of electrical contacts using high work function (Palladium) and low work function (Titanium) metals.
Main Results:
- Significant p-type behavior was achieved in chemically doped MoS2 devices with Palladium contacts.
- ML MoS2 transistors with Pd contacts demonstrated effective hole mobilities of (2.3 ± 0.7) cm2 V-1 S-1 and an on/off ratio exceeding 106.
- Low contact resistances ((482 ± 40) kΩ μm) and a Schottky barrier height of ≈156 meV were obtained for p-type MoS2 transistors.
- A MoS2 inverter was successfully fabricated using pristine (n-type) and p-doped ML MoS2.
Conclusions:
- Combined molecular doping and Palladium contact engineering is an effective strategy to achieve p-type behavior in ML MoS2.
- This approach facilitates the development of high-efficiency 2D-based semiconductor devices, including complementary circuits.
- The study presents a simple and effective route for contact engineering in 2D materials.
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