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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Silicon nitride optical phased array based on a grating antenna enabling wavelength-tuned beam steering
Optics Express
|March 4, 2020
Summary
Silicon nitride optical phased arrays (OPAs) offer wavelength-tuned beam steering. Optimizing cavity thickness enhances grating antenna efficiency for stabilized OPA design across desired spectral regions.
Area of Science:
- Photonics and Optical Engineering
- Materials Science for Integrated Optics
Background:
- Silicon nitride (SiN) optical phased arrays (OPAs) are emerging as a key alternative to silicon-based devices.
- Limited research exists on the wavelength-tuned beam steering capabilities of SiN OPAs.
Purpose of the Study:
- To investigate and optimize wavelength-tuned beam steering in SiN OPAs using grating antennas.
- To explore the spectral beam emission characteristics influenced by resonant cavity thickness.
Main Methods:
- Theoretical and experimental analysis of two SiN OPA devices with varying resonant cavity thicknesses (SiN core and buried oxide layer).
- Characterization of spectral emission and beam steering angles.
- Examination of optical thickness influence on antenna spectral response.
Main Results:
- Both fabricated SiN OPAs achieved a longitudinal beam steering angle of 7.4° for wavelengths between 1530-1630 nm.
- A device with a thicker buried oxide layer showed limited steering performance over a broad spectral range.
- Grating antenna efficiency was maximized when optical cavity thickness was an odd multiple of a quarter wavelength.
Conclusions:
- The optical thickness of the resonant cavity significantly impacts the spectral response and steering performance of SiN OPAs.
- Designing SiN OPAs with cavity optical thickness at odd quarter-wavelength multiples is a viable strategy for stabilized spectral operation.

