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Optical-Based Thickness Measurement of MoO3 Nanosheets
Sergio Puebla1, Antonio Mariscal-Jiménez2, Rosalía Serna Galán2
1Instituto de Ciencia de Materiales de Madrid (ICMM-CSIC), E-28049 Madrid, Spain.
Nanomaterials (Basel, Switzerland)
|July 3, 2020
Summary
We developed two rapid, non-destructive techniques for measuring the thickness of two-dimensional molybdenum trioxide (MoO3) flakes. These methods offer quick and accurate thickness determination for MoO3, crucial for its growing applications.
Area of Science:
- Materials Science
- Nanotechnology
- Condensed Matter Physics
Background:
- Two-dimensional (2D) molybdenum trioxide (MoO3) is gaining significant research interest.
- Accurate and rapid thickness characterization is essential for 2D MoO3.
- Existing methods for thickness measurement can be time-consuming or destructive.
Purpose of the Study:
- To present two fast, non-destructive methods for determining the thickness of MoO3 flakes.
- To enable efficient characterization of 2D MoO3 materials.
- To provide reliable thickness data for MoO3 on SiO2/Si substrates.
Main Methods:
- Quantitative analysis of flake color in optical microscopy images for approximate thickness.
- Micro-reflectance spectroscopy combined with Fresnel law modeling for precise thickness measurement.
Main Results:
- Optical microscopy provides a thickness approximation with an uncertainty of ±3 nm.
- Micro-reflectance spectroscopy yields accurate thickness measurements with an uncertainty of ±2 nm.
- Both methods are non-destructive and suitable for thin MoO3 films.
Conclusions:
- Developed rapid and non-destructive techniques for 2D MoO3 thickness evaluation.
- Optical microscopy offers a quick initial estimation.
- Micro-reflectance spectroscopy provides high accuracy for MoO3 flake thickness.

