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Updated: Dec 11, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Published on: July 5, 2016

Low-coherence digital holography with a multireflection reference mirror.

Quang Duc Pham, Yoshio Hayasaki

|August 16, 2020

Summary

This summary is machine-generated.

This study introduces a novel method to extend low-coherence digital holography measurement ranges significantly. The technique uses a special reference mirror and spatial filtering for advanced imaging of dynamic objects.

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Area of Science:

Optics and Photonics
Holography
Metrology

Background:

Low-coherence digital holography (LCDH) is limited by the coherence length of the light source.
Expanding the measurement range of LCDH is crucial for observing larger or more complex structures.
Current methods often require complex setups or multiple measurements.

Purpose of the Study:

To propose and demonstrate a method for extending the measurement range of LCDH.
To enable single-shot complex amplitude imaging of moving and deforming objects.
To provide a simple and effective way to control the measurement range.

Main Methods:

Implementation of a multireflection reference mirror comprising partially and highly reflective mirrors.
Application of the Fourier transform method with spatial filtering for complex amplitude imaging.
Adjustment of the highly reflective mirror's position and angle to control the measurement range.

Main Results:

Successfully expanded the measurement range of LCDH several times beyond the coherence length.
Demonstrated single-shot complex amplitude imaging suitable for dynamic objects.
Validated the method by measuring objects with general curved shapes and large step heights.

Conclusions:

The proposed method effectively extends the measurement range of low-coherence digital holography.
The technique is versatile and applicable to observing moving, deforming, and complex-shaped objects.
Simple adjustment of the reference mirror allows for straightforward control over the measurement range.