Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics

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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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Hussamud Din1, Faisal Iqbal1, Byeungleul Lee1

  • 1School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan 31253, Korea.

Micromachines
|December 1, 2020
PubMed

Keywords:
COMSOLMEMSfinite element analysis (FEA) modelgyroscopemechanical sensitivity

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