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Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots
Published on: November 1, 2013
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GaAs surface passivation for InAs/GaAs quantum dot based nanophotonic devices
Abhiroop Chellu1, Eero Koivusalo1, Marianna Raappana1
1Optoelectronics Research Centre, Physics Unit, Tampere University, Tampere, FI-33720, Finland.
Nanotechnology
|December 4, 2020
Summary
Researchers compared passivation techniques for InAs/GaAs quantum dots (QDs). Aluminum nitride (AlNₓ) passivation demonstrated superior long-term stability and significantly reduced surface recombination, enhancing photoluminescence for quantum light sources.
Area of Science:
- Materials Science
- Quantum Engineering
- Nanotechnology
Background:
- Close-to-surface InAs/GaAs quantum dots (QDs) suffer from oxidation and surface defects, degrading their optical properties.
- Effective passivation is crucial for preserving QD performance in optoelectronic devices.
Purpose of the Study:
- To evaluate and compare different passivation techniques for near-surface InAs/GaAs QDs.
- To identify passivation methods that enhance optical properties and ensure long-term stability.
Main Methods:
- Investigated N-passivation using hydrazine, hydrazine + AlOₓ (atomic layer deposition), and plasma-enhanced ALD of AlNₓ.
- Benchmarked passivation effectiveness by measuring emission linewidths and photocarrier decay rates.
- Assessed long-term stability and impact on surface recombination velocity.
Main Results:
- All three methods reduced GaAs surface oxidation and enhanced room-temperature photoluminescence (PL) intensity.
- Hydrazine + AlOₓ and AlNₓ showed long-term passivation stability, with AlNₓ being significantly more effective.
- AlNₓ passivation reduced spectral diffusion and surface recombination velocity by three orders of magnitude, increasing PL signal ~1030 times.
Conclusions:
- AlNₓ passivation offers exceptional long-term stability and significantly improves optical properties of InAs/GaAs QDs.
- This technique is highly promising for practical applications like quantum light sources utilizing QDs near air interfaces.

