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Directly correlated microscopy of trench defects in InGaN quantum wells
T J O'Hanlon1, F C-P Massabuau1, A Bao1
1Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge CB3 0FS, UK.
Ultramicroscopy
|March 25, 2021
Summary
Nanoscale trench defects in indium gallium nitride (InGaN) quantum wells (QWs) cause unusual light emission. Defect width and enclosed material influence cathodoluminescence (CL) redshift, linked to indium content and quantum well width variations.
Area of Science:
- Materials Science
- Semiconductor Physics
- Nanotechnology
Background:
- Indium gallium nitride (InGaN) quantum wells (QWs) are crucial for optoelectronic devices.
- Nanoscale trench defects in InGaN QWs exhibit unique optical properties.
- Understanding the origin of these defects is key to improving device performance.
Purpose of the Study:
- To investigate the relationship between surface morphology, subsurface structure, and light emission in InGaN QW trench defects.
- To elucidate the origin of unusual emission behavior and cathodoluminescence (CL) redshift associated with these defects.
- To correlate defect characteristics with quantum well properties and indium composition.
Main Methods:
- Correlated measurements using scanning probe microscopy, scanning electron microscopy (SEM), and transmission electron microscopy (TEM).
- Focused ion beam-SEM (FIB-SEM) for precise defect localization and lamella preparation.
- Cathodoluminescence (CL) spectroscopy to analyze light emission properties.
Main Results:
- CL redshift correlates with trench width and the prominence of enclosed material.
- Defect location (basal-plane stacking fault position) influences CL redshift and quantum well width.
- Increased indium content observed in enclosed quantum wells, with reduced quantum well width fluctuations.
Conclusions:
- Trench defects significantly alter InGaN QW properties, affecting light emission.
- Defect morphology and subsurface structure dictate the degree of CL redshift and indium distribution.
- Pinning of surface step edges by trenches may contribute to higher indium content in enclosed QWs, mitigating indium loss.

