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An Electric Field Microsensor with Mutual Shielding Electrodes.

Hucheng Lei^1,2, Shanhong Xia^1,2, Zhaozhi Chu³

¹State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China.

|April 3, 2021

Summary

This summary is machine-generated.

This study introduces an electric field microsensor (EFM) using novel mutual shielding electrodes. The design doubles the sensing area, significantly increasing the output signal for enhanced electric field detection.

Keywords:

electric field microsensor mutual shielding electrodes piezoelectric driven

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Area of Science:

Micro-electromechanical systems (MEMS)
Sensor technology
Applied electromagnetics

Background:

Electric field sensing is crucial for various applications.
Existing electric field microsensors face limitations in sensitivity and signal output.
The charge-induction principle offers a foundation for novel sensor designs.

Purpose of the Study:

To propose and validate a novel electric field microsensor (EFM) design.
To enhance sensor sensitivity by optimizing electrode configuration and utilizing mutual shielding.
To demonstrate the fabrication feasibility of the proposed EFM.

Main Methods:

Design of an EFM with interdigital fixed and piezoelectric-driven movable electrodes.
Utilizing mutual shielding and charge-induction principles for enhanced signal generation.
Finite element method (FEM) simulations to analyze sensor performance.
Fabrication of the microsensor chip using lead zirconate titanate (PZT) via sol-gel method.

Main Results:

Simulation confirms doubled sensing area leading to doubled induced charge variation.
The mutual shielding electrode design enhances the output signal significantly.
Successful fabrication of the EFM chip using PZT material.

Conclusions:

The proposed EFM with mutual shielding electrodes offers superior sensitivity and signal output.
The design is suitable for sensitive electric field detection applications.
The fabrication process is viable for producing functional microsensor chips.