Related Experiment Video
Updated: May 31, 2026

11:44
Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates
Published on: March 20, 2015
20.8K
Exploring SERS from complex patterns fabricated by multi-exposure laser interference lithography
Seong Jae Kim1, June Sik Hwang2, Jong-Eun Park1
1Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Republic of Korea.
Nanotechnology
|April 23, 2021
Summary
Multi-exposure laser interference lithography (MELIL) creates uniform plasmonic surfaces for surface-enhanced Raman scattering (SERS) sensors. This cost-effective method offers enhanced performance and tunable optical properties.
Area of Science:
- Plasmonics
- Nanotechnology
- Surface Science
Background:
- Uniform plasmonic surfaces are crucial for reproducible surface-enhanced Raman scattering (SERS) applications.
- Periodic nanostructures offer tunable optical properties and uniform SERS response.
- Laser interference lithography (LIL) is a maskless technique for fabricating periodic patterns.
Purpose of the Study:
- To develop a cost-effective fabrication method for large-area uniform plasmonic surfaces for SERS.
- To explore complex interference patterns using multi-exposure laser interference lithography (MELIL).
- To evaluate the SERS performance and optical properties of MELIL-fabricated patterns.
Main Methods:
- Utilized multi-exposure laser interference lithography (MELIL) to create complex periodic nanostructures.
- Deposited gold (Au) via e-beam evaporation and silver (Ag) via electroplating.
- Performed quantitative Raman scattering measurements and optical simulations.
Main Results:
- Achieved highly uniform SERS with a relative standard deviation below 6% in complex geometries.
- Demonstrated significant Raman enhancement factors of 0.387 × 10^5 (Au) and 1.451 × 10^5 (Ag).
- Optical simulations revealed broadened and shifted absorption peaks, indicating tunable optical properties.
Conclusions:
- MELIL is a versatile and cost-effective method for fabricating uniform plasmonic surfaces for SERS.
- Vacuum-free silver electroplating offers enhanced performance and cost-effectiveness.
- The MELIL process allows for expanded optical tunability, broadening SERS applications.
Keywords:
laser interference lithographylocalized surface plasmon resonancesurface-enhanced Raman spectroscopy (SERS)
