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Updated: Oct 28, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Increasing wavelength-controlled steering range of an optical phased array by using two subarrays
Applied Optics
|July 15, 2021
Summary
We developed a silicon optical phased array with two 16-channel subarrays. This device achieves a wide field of view and beam steering by tuning wavelength and phase differences.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Devices
Background:
- Optical phased arrays (OPAs) are crucial for beam steering applications.
- Silicon on insulator (SOI) technology offers a scalable platform for integrated photonic devices.
Purpose of the Study:
- To demonstrate a novel optical phased array (OPA) architecture.
- To achieve wide-angle beam steering using a compact SOI platform.
Main Methods:
- Fabrication of a two-subarray OPA on SOI, with 16 channels per subarray.
- Wavelength tuning (1500-1600 nm) across subarrays with different periods for steering.
- Introducing inter-channel phase differences for beam steering in another dimension.
Main Results:
- Achieved a field of view of 36.6°×32.6°.
- Demonstrated a steering range of 32.6° via wavelength tuning.
- Obtained a spot size of 1.68°×0.0673°.
Conclusions:
- The demonstrated OPA offers efficient beam steering capabilities.
- The SOI platform enables compact and scalable integrated optical systems.
- This technology has potential applications in optical communication and sensing.

