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Related Experiment Video

Updated: Oct 28, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Unidirectional large-scale waveguide grating with uniform radiation for optical phased array.

Baisong Chen, Yingzhi Li, Lanxuan Zhang

|July 16, 2021

Summary

This summary is machine-generated.

Two novel silicon nitride waveguide grating structures achieve high unidirectional radiation for optical phased arrays. The dual-level fishbone design offers superior feasibility and robustness to process variations.

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Related Experiment Videos

Last Updated: Oct 28, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

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Published on: October 11, 2016

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Published on: August 30, 2012

Area of Science:

Photonics and Optical Engineering
Materials Science

Background:

Optical phased arrays (OPAs) are crucial for beam steering applications.
Efficient unidirectional radiation from waveguides is essential for OPA performance.

Purpose of the Study:

To investigate novel dual-level waveguide grating structures for OPAs.
To achieve high unidirectional and uniform radiation from silicon nitride waveguides.

Main Methods:

Design of dual-level chain and dual-level fishbone waveguide gratings.
Utilizing silicon nitride (Si3N4) material.
Employing apodized perturbation for uniform radiation control.

Main Results:

Designed dual-level structures achieve 95% unidirectional radiation.
Experimental results show ~80-90% unidirectionality.
Both structures maintain unidirectional performance with uniform radiation.

Conclusions:

The dual-level fishbone structure demonstrates greater feasibility and robustness to process variations.
These novel gratings offer improved performance for optical phased array transmitters.