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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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A Compact Raster Lensless Microscope Based on a Microdisplay.

Anna Vilà1,2, Sergio Moreno1, Joan Canals1

  • 1Department of Electronic and Biomedical Engineering, University of Barcelona, Martí i Franquès 1, 08028 Barcelona, Spain.

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|September 10, 2021
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Summary
This summary is machine-generated.

This study demonstrates the smallest practical lensless microscope, achieving 800 nm resolution in a millimeter-high device. This raster optical microscopy approach simplifies imaging without complex light reconstruction.

Keywords:
microdisplay illuminationminute microscoperaster imagescan optical microscopy

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Area of Science:

  • Optics
  • Microscopy
  • Imaging Technology

Background:

  • Lensless microscopy offers a simplified optical configuration using only a light source, sample, and image sensor.
  • Traditional lensless methods often require complex light backpropagation for image reconstruction.

Purpose of the Study:

  • To demonstrate the smallest practical lensless microscope.
  • To achieve high resolution in a compact device without traditional lenses.

Main Methods:

  • Utilized raster optical microscopy with a single-pixel detector and a microdisplay.
  • Positioned the object near the lighting source, differing from standard lensless microscopy setups.
  • Optimized resolution by controlling LED size and sample-to-microdisplay proximity.

Main Results:

  • Achieved resolutions down to 800 nm within a millimeter-high microscope.
  • Demonstrated successful imaging with large detectors (138 μm × 138 μm).
  • Field of view was determined by the microdisplay size, simplifying the optical path.

Conclusions:

  • The developed microscope represents a significant miniaturization in lensless imaging.
  • The raster optical microscopy technique provides high resolution without requiring light backpropagation.
  • Further technological advancements could reduce measurement times for this compact microscopy system.