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Updated: Oct 20, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Anna Vilà1,2, Sergio Moreno1, Joan Canals1
1Department of Electronic and Biomedical Engineering, University of Barcelona, Martí i Franquès 1, 08028 Barcelona, Spain.
This study demonstrates the smallest practical lensless microscope, achieving 800 nm resolution in a millimeter-high device. This raster optical microscopy approach simplifies imaging without complex light reconstruction.
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