Humidity-Sensing Chipless RFID Tag with Enhanced Sensitivity Using an Interdigital Capacitor Structure

Junho Yeo1, Jong-Ig Lee2, Younghwan Kwon3

  • 1School of ICT Convergence, Daegu University, 201 Daegudae-ro, Gyeongsan 38453, Gyeongbuk, Korea.

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MOS Capacitor01:25

MOS Capacitor

A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
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