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Highly Sensitive NO₂ Detection by TVS-Grown Multilayer MoS₂ Films.

Kenjiro Hayashi^1,2, Masako Kataoka¹, Hideyuki Jippo^1,2

¹Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan.

|January 24, 2022

Summary

Polycrystalline molybdenum disulfide (MoS₂) films with small grain sizes show unexpectedly high sensitivity to nitrogen dioxide (NO₂) gas sensors. This finding suggests that grain boundaries and porous structures in MoS₂ can enhance sensor performance, offering new avenues for device fabrication.

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Area of Science:

Materials Science
Nanotechnology
Chemical Engineering

Background:

Two-dimensional layered materials like MoS₂ are promising for sensors due to their large surface area and electrical properties.
Grain boundaries in polycrystalline materials are often overlooked but can significantly impact device performance.
Understanding grain boundary effects is crucial for optimizing sensors based on layered materials.

Purpose of the Study:

To investigate the influence of grain size and grain boundaries on the NO₂ sensing properties of MoS₂ films.
To compare MoS₂ films grown by chemical vapor deposition (CVD) and thermal vapor sulfurization (TVS) for sensor applications.
To elucidate the mechanisms behind enhanced NO₂ adsorption and sensing in polycrystalline MoS₂.

Main Methods:

Growth of MoS₂ films with varying grain sizes using CVD and TVS methods.
Fabrication of transistor-based gas sensors using the synthesized MoS₂ films.
Evaluation of NO₂ sensing performance, including sensitivity and adsorption behavior (Langmuir isotherm).
Characterization using transmission electron microscopy (TEM) and theoretical calculations.

Main Results:

CVD-grown MoS₂ films exhibited superior electrical properties due to larger grain sizes.
TVS-grown MoS₂ films, with smaller grain sizes and mirror twin grain boundaries, showed unexpectedly higher NO₂ sensitivity.
NO₂ adsorption on modeled grain boundaries was comparable to the ideal basal plane.
Porous structures in TVS-grown films may also contribute to enhanced sensing.

Conclusions:

Highly sensitive MoS₂ gas sensors can be fabricated using polycrystalline films with small grain sizes.
Grain boundaries and porous structures play a significant role in enhancing NO₂ sensing.
This research opens possibilities for optimizing sensors based on other two-dimensional materials by controlling grain characteristics.