Related Experiment Video
Updated: Jul 19, 2026
06:25
Time Multiplexing Super Resolving Technique for Imaging from a Moving Platform
Published on: February 12, 2014
8.6K
Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging
Optics Express
|February 25, 2022
Summary
This study presents a silicon nitride optical phased array chip enabling wide-angle 2D beam steering. The chip achieved object detection up to 109 meters using advanced ranging systems.
Area of Science:
- Optoelectronics
- Integrated Photonics
- Silicon Nitride Photonics
Background:
- Silicon-based optoelectronic integrated optical phased arrays offer advantages in dense integration, wide scanning, and CMOS compatibility.
- Optical phased arrays are crucial for applications like LiDAR and optical communication.
Purpose of the Study:
- To design and fabricate a silicon nitride-on-silicon-on-insulator (SiN-on-SOI) two-dimensional optical phased array chip.
- To evaluate the chip's beam steering capabilities and its performance in ranging systems.
Main Methods:
- Fabrication of a SiN-on-SOI two-dimensional optical phased array.
- Demonstration of beam steering with a 96°×14.4° scanning range and 690 mW peak main lobe power.
- Integration of the chip into Time-of-Flight (ToF) and Frequency-Modulated Continuous-Wave (FMCW) ranging systems.
Main Results:
- Achieved a two-dimensional scanning range of 96°×14.4°.
- Demonstrated 690 mW peak power of the main lobe.
- Enabled object detection at 20 m (ToF) and 109 m (FMCW).
Conclusions:
- The developed SiN-on-SOI optical phased array chip exhibits excellent beam steering performance.
- The chip is suitable for advanced ranging applications, demonstrating significant detection distances.
- This technology advances silicon-based photonics for integrated optoelectronic systems.
