Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Influence of Spark Plasma Sintering Parameters on the Microstructure, Mechanical and Tribological Characteristics of Air-Milled Aluminum.

Materials (Basel, Switzerland)·2025
Same author

Ensuring colloidal stability of cisplatin-loaded mesoporous silica nanoparticles: from synthesis to cytotoxicity assays.

International journal of pharmaceutics·2025
Same author

High-sensitivity polymer-based bimodal plasmonic refractive index sensors with polymer cladding.

Optics express·2025
Same author

Balanced plasmonic-augmented silicon photonic interferometric sensor for biosensing applications.

Optics express·2025
Same author

Theoretical Analysis of Efficient Thermo-Optic Switching on Si<sub>3</sub>N<sub>4</sub> Waveguide Platform Using SiOC-Based Plasmo-Photonics.

Nanomaterials (Basel, Switzerland)·2025
Same author

Real-Time Observation of "Soft" Magic-Size Clusters during Hydrolysis of the Model Metallodrug Bismuth Disalicylate.

Journal of the American Chemical Society·2021
Same journal

Correction: Yang et al. Microstructural Characteristics of High-Pressure Die Casting with High Strength-Ductility Synergy Properties: A Review. <i>Materials</i> 2023, <i>16</i>, 1954.

Materials (Basel, Switzerland)·2026
Same journal

Effect of La and Ce Microalloying on the Corrosion Resistance of 0.4Sb Low-Alloy Steel in a Harsh Marine Atmospheric Environment.

Materials (Basel, Switzerland)·2026
Same journal

High-Temperature Properties of Magnesium Ammonium Phosphate Cement Modified with Gold Tailings.

Materials (Basel, Switzerland)·2026
Same journal

A Study on the Evolution of Intermetallic Phase Microstructure and High-Temperature Creep Behavior in Mg-8.0Al-1.0Nd-1.5Gd-Mn Alloys.

Materials (Basel, Switzerland)·2026
Same journal

Material-Driven Clinical Complications in Mechanical Circulatory Support: From Blood-Material Interactions to Device-Related Adverse Events.

Materials (Basel, Switzerland)·2026
Same journal

Influence of Final Irrigation on Calcium Silicate-Based Sealer Dentinal Tubular Penetration: A Systematic Review.

Materials (Basel, Switzerland)·2026
See all related articles

Related Experiment Video

Updated: Sep 27, 2025

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
10:27

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Published on: February 27, 2013

15.7K

Optimized ICPCVD-Based TiO2 for Photonics.

Aurore Andrieux1, Marie-Maxime Mennemanteuil1, Nicolas Geoffroy1

  • 1Laboratoire Interdisciplinaire Carnot de Bourgogne (ICB), Université Bourgogne Franche-Comté, 21078 Dijon, France.

Materials (Basel, Switzerland)
|April 12, 2022
PubMed
Summary
This summary is machine-generated.

We developed a method to create dense titanium dioxide (TiO2) films for low-loss waveguides. Our approach achieves a high refractive index of 2.6 by controlling nanoscale crystallization during deposition and annealing.

Keywords:
optical propertiesphotonicsplasma-assisted CVDtitanium dioxide

More Related Videos

Fabrication of Fully Solution Processed Inorganic Nanocrystal Photovoltaic Devices
11:06

Fabrication of Fully Solution Processed Inorganic Nanocrystal Photovoltaic Devices

Published on: July 8, 2016

10.6K
Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
12:08

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Published on: July 18, 2015

10.9K

Related Experiment Videos

Last Updated: Sep 27, 2025

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
10:27

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Published on: February 27, 2013

15.7K
Fabrication of Fully Solution Processed Inorganic Nanocrystal Photovoltaic Devices
11:06

Fabrication of Fully Solution Processed Inorganic Nanocrystal Photovoltaic Devices

Published on: July 8, 2016

10.6K
Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
12:08

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Published on: July 18, 2015

10.9K

Area of Science:

  • Materials Science
  • Optoelectronics
  • Thin Film Technology

Background:

  • Fabricating low-loss waveguides requires dense, homogeneous thin films with high refractive indices.
  • Titanium dioxide (TiO2) is a promising material, but achieving optimal optical properties is challenging.
  • Crystallized or amorphous TiO2 layers often exhibit insufficient refractive indices for targeted waveguide applications.

Purpose of the Study:

  • To optimize the fabrication of TiO2 films via ICPCVD for low-loss waveguides.
  • To investigate the impact of deposition and annealing parameters on TiO2 film properties.
  • To achieve an intermediate crystallization state in TiO2 films for enhanced optical performance.

Main Methods:

  • Inductively Coupled Plasma Chemical Vapor Deposition (ICPCVD) was used to deposit TiO2 films.
  • Systematic variation of plasma power, pressure, deposition time, and annealing temperature.
  • Structural, crystalline, and optical properties were analyzed using techniques including Transmission Electron Microscopy (TEM).

Main Results:

  • Nanoscale crystallization into the rutile phase occurred during ICPCVD deposition.
  • Optimized conditions yielded a refractive index of 2.5 at 630 nm with high film homogeneity.
  • Annealing further increased the refractive index to 2.6.
  • TEM confirmed nanocrystallization and the presence of both anatase and rutile phases.

Conclusions:

  • An intermediate nanoscale crystallization state of TiO2 is optimal for guided optics applications.
  • ICPCVD combined with controlled annealing offers a viable method for fabricating high-performance waveguide materials.
  • The achieved refractive index and homogeneity meet the stringent requirements for low-loss waveguides.