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Spatial resolution in secondary-electron microscopy.

R F Egerton1, Y Zhu2

  • 1Physics Department, University of Alberta, Edmonton, Alberta T1W 2E2, Canada.

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This summary is machine-generated.

This study reviews electron microscopy resolution and contrast, detailing secondary electron generation and imaging techniques. It explores achieving atomic resolution in both thin and bulk specimens using scanning electron microscopy.

Keywords:
SEMSTEMTEMresolutionsecondary electrons

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Area of Science:

  • Materials Science
  • Physics
  • Electron Microscopy

Background:

  • Electron microscopy relies on resolution and contrast, influenced by electron optics.
  • Secondary electrons (SEs) are crucial for imaging, originating from specimen surface interactions.
  • Understanding SE generation and transport is key to optimizing imaging.

Purpose of the Study:

  • To review the significance of resolution and contrast in electron microscopy.
  • To outline the physics of secondary electron generation, transport, and emission.
  • To discuss SE imaging in scanning electron microscopes (SEM) for atomic resolution.

Main Methods:

  • Review of electron optics principles affecting resolution and contrast.
  • Theoretical outline of secondary electron physics.
  • Analysis of SE imaging modes in SEM and scanning-transmission electron microscopy.

Main Results:

  • Electron optics critically impact resolution and contrast in electron microscopy.
  • Secondary electron emission and transport dynamics are fundamental to SE imaging.
  • Atomic resolution is achievable in thin specimens and potentially in bulk specimens.

Conclusions:

  • Optimizing electron optics and understanding SE physics are vital for high-resolution electron microscopy.
  • Scanning electron microscopy offers pathways to observe atomic structures.
  • Further investigation into bulk specimen imaging at SEM energies is warranted.