Lithographic Tuning of Polymeric Thin Film Surfaces by Stress Relaxation

Nandini Bhandaru1, Sudeshna Roy1, Suruchi1

  • 1Instability and Soft Petterning Laboratory, Department of Chemical Engineering, Indian Institute of Technology Kharagpur, West Bengal, 721 302, India.

ACS Macro Letters
|May 18, 2022
PubMed

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