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Impact of Stacking-Up and Scaling-Down Bit Cells in 3D NAND on Their Threshold Voltages

Dongwoo Lee1, Changhwan Shin2

  • 1Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon 16419, Korea.

Micromachines
|July 27, 2022
PubMed

Keywords:
3D NAND flashmacaroni channelnanowire channeltapered channel

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