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MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry-Pérot Resonances
Paul C V Thrane1,2, Chao Meng1, Fei Ding1
1Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense DK-5230, Denmark.
Nano Letters
|August 18, 2022
Summary
Tunable metasurfaces using microelectromechanical systems (MEMS) offer adaptive optics. This study compares gap-surface plasmon (GSP) and Fabry-Pérot (FP) tunable metasurfaces, providing design guidelines for miniaturized adaptive optical systems.
Area of Science:
- Metasurfaces and Nanophotonics
- Adaptive Optics
- Microelectromechanical Systems (MEMS)
Background:
- Tunable metasurfaces are crucial for advanced adaptive optical systems.
- Microelectromechanical systems (MEMS) integrated with gap-surface plasmon (GSP) metasurfaces offer efficient, broadband, and fast optical modulation.
- Comparing different operational regions is essential for optimizing metasurface design.
Purpose of the Study:
- To compare the performance of tunable metasurfaces operating in GSP and Fabry-Pérot (FP) regions.
- To investigate polarization-independent blazed gratings numerically and experimentally.
- To provide design guidelines for tunable metasurfaces in adaptive optics.
Main Methods:
- Numerical simulations and experimental measurements of tunable metasurfaces.
- Investigation of polarization-independent blazed gratings.
- Analysis of operational bandwidth, efficiency, and unit cell coupling.
Main Results:
- Similar peak efficiencies (∼75% calculated, ∼40% measured) were observed for both GSP and FP regions.
- GSP operation exhibited a larger bandwidth compared to FP.
- Increased air gaps led to coupling effects and reduced efficiency.
Conclusions:
- The study provides a comparative analysis of GSP and FP tunable metasurfaces.
- GSP offers broader bandwidth, while FP provides relaxed assembly tolerances.
- Understanding unit cell coupling is vital for efficient tunable metasurface design in adaptive optics.
