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Related Experiment Video

Updated: Aug 28, 2025

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Micro 3D printing of a functional MEMS accelerometer.

Simone Pagliano1, David E Marschner1, Damien Maillard2

  • 1KTH Royal Institute of Technology, Division of Micro and Nanosystems, Malvinas väg 10, Stockholm, Sweden.

Microsystems & Nanoengineering
|September 22, 2022
PubMed
Summary

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3D printing enables the creation of functional Microelectromechanical system (MEMS) accelerometers. This innovation addresses limitations in traditional manufacturing for low-volume, custom MEMS devices.

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Microelectromechanical systems (MEMS) are crucial components in automotive, consumer electronics, and medical devices.
  • High-volume semiconductor manufacturing is cost-effective for MEMS but not for specialized, low-to-medium volume applications.
  • Existing custom MEMS production is challenging for markets needing fewer than 10,000 components annually.

Purpose of the Study:

  • To demonstrate a viable 3D printing method for producing functional MEMS devices.
  • To overcome the limitations of current micro-3D printing for MEMS fabrication.
  • To enable cost-efficient production of custom MEMS for niche markets.

Main Methods:

  • Utilized two-photon polymerization for 3D printing the MEMS accelerometer structure.
Keywords:
Electrical and electronic engineeringNanoscience and technology

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  • Integrated a strain gauge transducer via metal evaporation.
  • Characterized the device's responsivity, resonance frequency, and long-term stability.

    • Main Results:

    • Successfully fabricated a functional 3D-printed MEMS accelerometer.
    • Demonstrated the viability of combining micro-3D printing with metal deposition for MEMS.
    • Characterization confirmed the device's performance metrics.

    Conclusions:

    • 3D printing is a feasible approach for manufacturing functional MEMS devices.
    • This technology opens possibilities for custom MEMS in new application areas.
    • It addresses the unmet need for efficient low-to-medium volume MEMS production.