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Simulation Study: The Impact of Structural Variations on the Characteristics of a Buried-Channel-Array Transistor

Minjae Sun1,2, Hyoung Won Baac3, Changhwan Shin4

  • 1Department of Semiconductor Display Engineering, Sungkyunkwan University, Suwon 16419, Korea.

Micromachines
|September 23, 2022
PubMed

Keywords:
buried channel array transistordevice characteristicsshort channel effectsstructural variation

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