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Updated: Aug 16, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Mikhail O Petrushkov1, Demid S Abramkin2,3, Eugeny A Emelyanov1
1Laboratory of Physical Bases of Semiconductor Heterostructures Epitaxy, Institute of Semiconductor Physics, SB RAS, Novosibirsk 630090, Russia.
Low-temperature Gallium Arsenide (LT-GaAs) layers effectively filter dislocations in Gallium Arsenide/Silicon heterostructures. This method significantly improves structural properties for high-quality optoelectronic devices.
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