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Updated: Aug 15, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Monochromatic computed tomography using laboratory-scale setup.
Ari-Pekka Honkanen1,2, Simo Huotari3
1Comprehensive Cancer Center, Helsinki University Hospital, P.O. BOX 180, 00029, Hus, Finland. ari-pekka.honkanen@hus.fi.
This study shows that X-ray absorption near edge structure tomography can map chemical states in 3D. This technique works with standard X-ray sources for materials analysis.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- X-ray absorption near edge structure (XANES) spectroscopy is crucial for chemical state analysis.
- Tomography enables 3D imaging, but monochromatic XANES tomography often requires high-brilliance sources.
- Developing laboratory-scale XANES tomography is essential for broader accessibility.
Purpose of the Study:
- To demonstrate the feasibility of monochromatic full-field X-ray absorption near edge structure based tomography.
- To utilize a laboratory-scale Johann-type X-ray absorption spectrometer with a conventional X-ray tube source.
- To enable volumetric chemical speciation analysis in mm-scale samples.
Main Methods:
- Employed a laboratory-scale Johann-type X-ray absorption spectrometer.
- Utilized a conventional X-ray tube as the source.
- Applied absorption edge contrast tomography to a phantom with selenium compounds (elemental Se, Na2SeO3, Na2SeO4).
Main Results:
- Successfully mapped the 3D distributions of selenium in different oxidation states within a phantom.
- Distinguished between various selenium chemical states and the surrounding phantom matrix.
- Demonstrated the capability of the method using a low-brilliance X-ray source.
Conclusions:
- Highly monochromatic full-field XANES tomography is viable with laboratory-scale setups.
- This technique provides a new analytical tool for volumetric chemical speciation.
- The method has potential applications in materials engineering, biology, and chemistry.
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