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Related Concept Videos

X-ray Imaging01:24

X-ray Imaging

5.7K
German physicist Wilhelm Röntgen (1845–1923) was experimenting with electrical current when he discovered that a mysterious and invisible "ray" would pass through his flesh but leave an outline of his bones on a screen coated with a metal compound. In 1895, Röntgen made the first durable record of the internal parts of a living human: an "X-ray" image (as it came to be called) of his wife’s hand. Scientists worldwide quickly began their own experiments with...
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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Self-aligned multi-layer X-ray absorption grating using large-area fabrication methods for X-ray phase-contrast

Abdollah Pil-Ali1,2, Sahar Adnani3,4, Karim S Karim3,4

  • 1Department of Electrical and Computer Engineering, University of Waterloo, 200 University Ave W, Waterloo, ON, N2L3G1, Canada. apilali@uwaterloo.ca.

Scientific Reports
|February 13, 2023
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Summary

A new fabrication process enables large-area X-ray absorption gratings for medical imaging. This advancement overcomes limitations in grating technology, paving the way for wider adoption of X-ray phase-contrast (XPCi) imaging systems.

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Area of Science:

  • Medical Imaging Technology
  • Materials Science and Engineering
  • Nanofabrication

Background:

  • X-ray phase-contrast (XPCi) imaging offers superior soft tissue contrast compared to conventional X-ray and CT.
  • Grating-based XPCi systems utilize absorption gratings to acquire transmission, refraction, and dark-field images simultaneously.
  • Current limitations in large-area, high aspect ratio absorption grating fabrication hinder the commercialization and clinical adoption of XPCi.

Purpose of the Study:

  • To develop a scalable and cost-effective fabrication process for large-area X-ray absorption gratings.
  • To enable XPCi systems with footprints and price points suitable for the medical market.
  • To advance the development of various XPCi techniques, including Talbot-Lau, speckle-tracking, and coded-aperture systems.

Main Methods:

  • A self-aligned multi-layer grating fabrication process leveraging techniques from the thin-film transistor (TFT) display industry.
  • Utilized ITO-on-glass substrates with Cr/Au/Cr films as self-aligned lithography masks for backside exposure.
  • Employed SU-8 photoresist patterning and electroplating of X-ray attenuating materials to create multi-layer gratings.

Main Results:

  • Successfully fabricated a prototype three-layer grating with micron-scale features on a 4-inch glass substrate.
  • Achieved a grating visibility of 0.28 at 25 keV with a 50 mm x 50 mm active area.
  • Demonstrated the grating's functionality by integrating it into a commercial 3D propagation-based XPCi microscope.

Conclusions:

  • The reported self-aligned multi-layer fabrication process is repeatable and suitable for producing high aspect ratio X-ray absorption gratings.
  • This scalable and cost-effective approach addresses the critical need for large-area gratings in XPCi systems.
  • The advancement is expected to accelerate the commercial development and adoption of XPCi for clinical and industrial applications.