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Measurement and correction of TEM image distortion using arbitrary samples.

Hirokazu Tamaki1,2, Koh Saitoh3

  • 1Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan.

Microscopy (Oxford, England)
|February 14, 2023
PubMed
Summary

A new method quantitatively measures transmission electron microscope image distortion without standard samples. This technique accurately determines radial and azimuthal distortion, enabling precise image correction for improved clarity.

Keywords:
TEMdistortion correctionimage distortionimage stitchingtomography

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Area of Science:

  • Optics and Microscopy
  • Image Analysis

Background:

  • Image distortion is a critical Seidel aberration in transmission electron microscopy (TEM).
  • Accurate measurement of distortion is essential for high-resolution imaging and quantitative analysis.
  • Existing methods often require standard samples with known structures, limiting their applicability.

Purpose of the Study:

  • To develop a novel method for quantitative measurement of image distortion in TEM.
  • To enable distortion measurement without relying on standard samples.
  • To provide a basis for effective distortion correction in electron microscopy.

Main Methods:

  • Image distortion was quantified by measuring displacements of local image segments before and after a shift at the objective lens's first image plane.
  • The Laplacian of the displacement field was calculated to determine radial and azimuthal distortion parameters.
  • Numerical simulations and experimental TEM images were used for validation.

Main Results:

  • The proposed method achieved a relative error ratio of 0.04 for distortion amounts ranging from 0.1% to 5.0%.
  • Distortion measurement and correction were successfully demonstrated on experimental TEM images.
  • Iterative measurement and correction reduced average image displacement to less than 0.05 pixels.

Conclusions:

  • The developed method provides a robust and accurate way to measure TEM image distortion without standard samples.
  • This technique facilitates precise correction of image distortions, enhancing the fidelity of electron microscopy data.
  • The findings contribute to improved quantitative imaging in transmission electron microscopy.