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Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection.

Tarek Seoudi¹, Julien Charensol¹, Wioletta Trzpil¹

¹IES, CNRS, University of Montpellier, 34095 Montpellier, France.

Sensors (Basel, Switzerland)

|March 30, 2023

Summary

This study introduces an advanced MEMS capacitive sensor for photoacoustic gas detection. The novel silicon-based sensor offers enhanced performance for compact and integrated gas sensing applications.

Keywords:

MEMS capacitive transduction gas sensor micro-mechanical resonator photoacoustic spectroscopy

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Three-dimensional Optical-resolution Photoacoustic Microscopy

Three-dimensional Optical-resolution Photoacoustic Microscopy

Published on: May 3, 2011

Area of Science:

Microelectromechanical Systems (MEMS)
Optical Spectroscopy
Chemical Sensing

Background:

Limited literature exists on integrated, compact silicon-based photoacoustic gas sensors.
Existing MEMS microphones lack the high quality factor needed for sensitive detection.
Quartz Tuning Forks (QTF) offer high quality factors but are not silicon-based.

Purpose of the Study:

To develop an enhanced MEMS capacitive sensor for photoacoustic gas detection.
To integrate the advantages of silicon MEMS technology with the high quality factor of QTFs.
To create a compact, silicon-based photoacoustic gas sensor with improved performance.

Main Methods:

Design and fabrication of a novel mechanical resonator using silicon-on-insulator (SOI) wafers.
Functional partitioning of the structure to enhance photoacoustic energy collection and overcome damping.
Electrical characterization of resonator frequency response and nominal capacitance.
Photoacoustic gas detection of methane in nitrogen without an acoustic cavity.

Main Results:

Demonstrated sensor viability and linearity using calibrated methane concentrations.
Achieved a limit of detection (LOD) of 104 ppmv with 1s integration time.
Obtained a normalized noise equivalent absorption coefficient (NNEA) of 8.6 × 10⁻⁸ Wcm⁻¹ Hz⁻¹/².
Performance surpasses that of bare Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS).

Conclusions:

The developed MEMS capacitive sensor is effective for photoacoustic gas detection.
The sensor design overcomes limitations of existing compact gas sensing technologies.
This silicon-based sensor represents a significant advancement for integrated and selective gas sensing.