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Capacitive Sensing for 2-D Electrostatic MEMS Scanner in a Clinical Endomicroscope
Miki Lee1, Haijun Li1, Mayur B Birla2
1Department of Internal Medicine, University of Michigan, Ann Arbor, MI, 48109, USA.
IEEE Sensors Journal
|July 27, 2023
Summary
A new capacitive sensing method tracks micro-electromechanical system (MEMS) scanner motion for improved confocal laser endomicroscopy. This technique enhances in vivo imaging by enabling precise phase extraction for accurate image reconstruction.
Area of Science:
- Biomedical Engineering
- Optical Imaging
- Micro-electromechanical Systems (MEMS)
Background:
- Confocal laser endomicroscopy requires precise scanning for in vivo human imaging.
- Environmental factors cause phase shifts in MEMS scanners, hindering image reconstruction.
- Current calibration methods are limited by image quality and potential laser exposure.
Purpose of the Study:
- To develop a non-invasive capacitive sensing method for tracking MEMS scanner motion.
- To extract essential phase information for accurate endomicroscopic image reconstruction.
- To enable pre-calibration of MEMS scanners in clinical settings.
Main Methods:
- Developed a capacitive sensing circuit utilizing amplitude modulation envelope detection.
- Optimized circuit parameters for high scan frequencies and transmission line effects.
- Leveraged nonlinear MEMS scanner dynamics for phase information extraction.
Main Results:
- Demonstrated accurate tracking of the two-dimensional MEMS scanner motion.
- Achieved phase estimation accuracy of 2.18° (X-axis) and 0.79° (Y-axis).
- Verified sensing circuit performance against position sensing detector measurements.
Conclusions:
- The capacitive sensing method effectively tracks MEMS scanner motion and extracts phase information.
- This technique offers a viable solution for pre-calibration in clinical MEMS-based imaging.
- Improves the reliability and accuracy of in vivo confocal laser endomicroscopy.
