Imaging Extreme Ultraviolet Radiation Using Nanodiamonds with Nitrogen-Vacancy Centers

Area of Science:

• Materials Science
• Optics and Photonics
• Nanotechnology

Background:

• Extreme ultraviolet (EUV) radiation is crucial for nanoelectronic chip fabrication.
• Current methods for EUV characterization face limitations.
• Novel imaging techniques are needed for advanced lithography.

Purpose of the Study:

• To demonstrate fluorescent nanodiamonds (FNDs) with nitrogen-vacancy (NV) centers as novel scintillators for EUV radiation imaging.
• To develop and test an FND-based imaging device for EUV beam diagnostics.

Main Methods:

• Utilized ∼100 nm FNDs with NV centers, forming a stable thin film via electrospray deposition.
• Developed an FND-based imaging device for EUV detection.
• Applied the device for beam diagnostics of 50 nm and 13.5 nm synchrotron radiations.

Main Results:

• Achieved a spatial resolution of 30 μm with a ∼1 μm thick FND film.
• Measured a noise equivalent power density of 29 μW/(cm² Hz^1/2) for 13.5 nm radiation.
• Demonstrated bright red fluorescence emission from NV⁰ centers upon EUV excitation.

Conclusions:

• FNDs with NV centers serve as effective scintillators for EUV imaging.
• The developed FND-based device offers a viable solution for EUV beam characterization.
• This technique is broadly applicable to various EUV sources and applications.