Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Radiation-activated astrocytes promote tumor progression through CXCL12 secretion and induce resistance to anti-PD-1 immunotherapy.

Translational cancer research·2026

Same author

Dynamical simulation of on-axis transmission Kikuchi and spot diffraction patterns, based on accurate diffraction geometry calibration.

Journal of microscopy·2026

Same author

Phase-engineered distributed grating reliefs for high-power single-mode 795-nm VCSELs with on-axis emission.

Optics letters·2026

Same author

DSKO: Dancing through DFTB Parametrization.

Journal of chemical theory and computation·2026

Same author

Enantioselective Synthesis of an Indenopyrrole Scaffold Containing an All-Carbon Quaternary Stereocenter via a Visible-Light-Mediated Organocatalytic Carbene Transfer Reaction.

Organic letters·2026

Same author

PSMC2 serves as a potential regulatory target of EZH2 in promoting glioma progression via epithelial-mesenchymal transition.

Scientific reports·2026

Same journal

Lingual Surface Morphology in Delphinids: Structural Adaptations to Feeding Strategies.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

Same journal

A Scalable Pathway for Plan-View TEM of 2D Materials and Surface Layers.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

Same journal

Unsupervised Segmentation and Clustering Workflow for Efficient Processing of 4D-STEM and 5D-STEM Data.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

Same journal

Development of an EDS-Based Grain Segmentation Method for MIMAS-MOX Nuclear Fuels.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

Same journal

The Fabrication of Atom Probe Tomography Specimens From Mineral Nanoplates by Focused Ion Beam Redeposition.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

Same journal

From Bone to Body: Qualitative Evaluation of Collagenous Tissues Using JFRL Staining in Normal and Pathological Conditions.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026

See all related articles

Search research articles

Related Experiment Video

Updated: Jul 11, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Published on: July 17, 2015

Imaging Threading Dislocations and Surface Steps in Nitride Thin Films Using Electron Backscatter Diffraction.

Kieran P Hiller¹, Aimo Winkelmann^1,2, Ben Hourahine¹

¹Advanced Materials Diffraction Lab, Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|November 10, 2023

Summary

This summary is machine-generated.

New electron backscatter diffraction (EBSD) imaging techniques, virtual diode (VD) and center of mass (COM), effectively visualize threading dislocations and surface steps in nitride thin films. These methods offer improved signal-to-noise for enhanced optoelectronic device analysis.

Keywords:

EBSD SEM dislocations extended defects nitrides thin film semiconductors

More Related Videos

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Published on: May 28, 2016

$Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction$

Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction

Published on: April 1, 2017

Related Experiment Videos

Last Updated: Jul 11, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Published on: July 17, 2015

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Published on: May 28, 2016

$Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction$

Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction

Published on: April 1, 2017

Area of Science:

Materials Science
Solid State Physics
Electron Microscopy

Background:

Extended defects like threading dislocations significantly degrade optoelectronic device performance.
Traditional scanning electron microscopy (SEM) methods for imaging dislocations rely on single diodes and specific sample positioning.
Electron backscatter diffraction (EBSD) detectors offer a more advanced approach to analyzing crystalline materials.

Purpose of the Study:

To introduce novel postprocessing techniques using EBSD detectors for imaging dislocations and surface steps.
To demonstrate the effectiveness of virtual diode (VD) and center of mass (COM) imaging methods.
To evaluate the performance of combined VDCOM imaging for nitride thin films.

Main Methods:

Utilizing a pixelated EBSD detector instead of traditional diodes in SEM.
Implementing virtual diode (VD) imaging by monitoring backscattered electron intensity in specific EBSD pattern segments.
Applying center of mass (COM) imaging by tracking the distribution's centroid and combining both into VDCOM.

Main Results:

Successfully extracted images of threading dislocations and surface steps from unprocessed EBSD patterns.
VDCOM imaging demonstrated superior signal-to-noise ratios compared to individual VD or COM methods.
The VDCOM technique proved applicable to various nitride semiconductor thin films with diverse defect densities.

Conclusions:

EBSD-based VD and COM imaging provide powerful, non-destructive methods for visualizing critical defects in semiconductor thin films.
VDCOM imaging enhances the characterization of threading dislocations and surface steps, crucial for optoelectronic device optimization.
This approach offers a significant advancement in the analysis of nitride-based materials for electronic and photonic applications.