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Hybrid Metrology for Nanostructured Optical Metasurfaces
Irdi Murataj1,2, Angelo Angelini1, Eleonora Cara1
1Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy.
ACS Applied Materials & Interfaces
|November 22, 2023
Summary
This study introduces a new hybrid metrology method using X-ray techniques to precisely measure the refractive index of nanoscale dielectric materials. This advances the manufacturing of functional metasurfaces with tailored optical properties.
Area of Science:
- Nanotechnology
- Materials Science
- Optics
Background:
- Metasurfaces offer miniaturization and novel functionalities over traditional optical elements.
- Advancements enable nanometer-scale metasurfaces for visible wavelengths, but large-scale manufacturing faces challenges.
- Precise characterization of dielectric nanostructures' refractive index is crucial but lacking.
Purpose of the Study:
- To develop and validate a hybrid metrology strategy for nanoscale refractive index determination.
- To enable precise material characterization for fabricating functional metasurfaces.
- To correlate material properties with optical functionality.
Main Methods:
- Integration of complementary synchrotron-based traceable X-ray techniques.
- Fabrication of TiO2 nanostructures using block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS).
- Utilizing physical models to integrate synchrotron data and validate laboratory measurements.
Main Results:
- Demonstrated a hybrid metrology approach for comprehensive nanoscale material characterization.
- Successfully fabricated TiO2 nanostructures with controlled dimensions and composition.
- Established a validation scheme for determining effective refractive indices of nanoscale dielectric materials.
Conclusions:
- The hybrid metrology strategy provides precise and reliable refractive index determination for dielectric nanostructures.
- This approach supports the development of large-scale manufacturing for customizable metasurfaces.
- Accurate metrology is essential for correlating material properties with optical performance in nanophotonics.
