Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices
Related Experiment Video
Updated: Jul 7, 2025

16:05
Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
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1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Micromachines
|December 23, 2023
Abstract:
Micro-electromechanical systems (MEMS) are miniature systems comprising micro-mechanical sensors, actuators, and microelectronic circuits [...].

