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Updated: Jun 16, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Richard J H Morris1, Jhao-Rong Lin1,2, Jeroen E Scheerder1
1imec, Kapeldreef 75, Leuven 3001, Belgium.
Atom probe measurements underestimated oxygen in barium-doped strontium titanate (Ba-SrTiO) layers. This occurred because oxygen and titanium ions evaporated together, skewing composition quantification.
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