Programmable Ferroelectricity in Hf0.5Zr0.5O2 Enabled by Oxygen Defect Engineering

Minghao Shao1, Houfang Liu1, Ri He2

  • 1Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.

Nano Letters
|January 22, 2024
PubMed
Summary

This study demonstrates electrically controllable ferroelectricity in hafnia-based heterostructures using a novel electrode. This allows for multilevel polarization states, advancing ferroelectric electronics and memory applications.

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