Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance...

Area of Science:

• Mechanical Engineering
• Robotics
• Nanotechnology

Background:

• Micropositioning stages are crucial for precision manipulation in various scientific and industrial applications.
• Existing designs often face limitations in range, resolution, or motion decoupling.

Purpose of the Study:

• To present a novel parallel two degrees-of-freedom (DOF) flexure-based micropositioning stage for large-range applications.
• To enhance motion decoupling and improve trajectory tracking and disturbance rejection capabilities.

Main Methods:

• Design utilizing compound hybrid compliant prismatic joints (CHCPJ) and four-beam parallelogram compliant prismatic joints (4BPCPJ).
• Analysis of compliance and dynamics using compliance matrix method and Lagrange approach.
• Verification through finite element analysis (FEA) and experimental setup with laser interferometry.
• Implementation of linear active disturbance rejection control (LADRC).

Main Results:

• Achieved a large manipulation range of 2.5 mm in both X and Y axes.
• Demonstrated a high resolution of 0.4 μm.
• Experimental validation confirmed improved trajectory tracking and disturbance rejection.

Conclusions:

• The novel flexure-based stage offers significant advancements in range and resolution for micropositioning.
• The integrated control strategy effectively enhances motion quality and system performance.