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Metal-Semiconductor Junctions01:24

Metal-Semiconductor Junctions

352
The contact of metal and semiconductor can lead to the formation of a junction with either Schottky or Ohmic behavior.
Schottky Barriers
Schottky barriers arise when a metal with a work function (Φm) contacts a semiconductor with a different work function (Φs). Initially, electrons transfer until the Fermi levels of the metal and semiconductor align at equilibrium. For instance, if Φm > Φs, the semiconductor Fermi level is higher than the metal's before contact. The...
352

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Implementation of Highly Reliable Contacts for RF MEMS Switches.

Lili Jiang1,2, Lifeng Wang1, Xiaodong Huang1

  • 1Key Laboratory of MEMS of the Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China.

Micromachines
|January 26, 2024
PubMed
Summary

Highly reliable contacts for Radio Frequency Microelectromechanical System (RF MEMS) switches were developed. A circular contact design using gold and platinum films demonstrated superior durability, enduring over 1.2 billion cycles.

Keywords:
RF MEMS switchhighly reliable contactslifetimeshape of contacts

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Microelectromechanical Systems (MEMS)

Background:

  • Contacts are critical components in Radio Frequency Microelectromechanical System (RF MEMS) switches, significantly influencing their performance.
  • Gold is a preferred material for RF MEMS contacts due to its low resistance, stability, and process maturity.
  • Enhancing contact reliability is crucial for the longevity and effectiveness of RF MEMS switches.

Purpose of the Study:

  • To implement highly reliable contacts for direct-contact RF MEMS switches.
  • To investigate the impact of contact shape and materials on switch reliability.
  • To present fabrication processes for advanced RF MEMS switch contacts.

Main Methods:

  • Fabrication of three distinct contact shapes for RF MEMS switches.
  • Utilization of gold as the primary metal and a platinum film on the bottom contact area.
  • Employing dry/wet combined processes for creating a circular-shaped contact.
  • Experimental testing to evaluate RF performance and contact reliability.

Main Results:

  • Contact shape had minimal impact on the RF performance of the switches.
  • The circular-shaped contact exhibited significantly enhanced reliability compared to other designs.
  • The circular contact maintained functionality after an extensive 1.2 × 10^9 switching cycles.

Conclusions:

  • The developed circular contact design offers superior reliability for direct-contact RF MEMS switches.
  • The combination of gold and a platinum film effectively enhances contact durability.
  • This research contributes to the advancement of robust and long-lasting RF MEMS switch technology.