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An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion

Jun Uzuhashi1, Tadakatsu Ohkubo1, Kazuhiro Hono1

  • 1Research Center for Magnetic and Spintronic Materials, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|March 5, 2024
PubMed
Summary

Automated site-specific tip preparation for atom probe tomography (APT) using focused ion beam (FIB) and scanning electron microscopy (SEM) enhances throughput and reliability in materials research.

Keywords:
APT: atom probe tomographyFIB: focused ion beamSEM: scanning electron microscopyautomation

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Analytical Chemistry

Background:

  • Atom Probe Tomography (APT) is a powerful technique for nanoscale material analysis.
  • Traditional APT tip preparation is manual, time-consuming, and can lack reproducibility.
  • Previous work automated tip shape control, but not site-specific preparation.

Purpose of the Study:

  • To develop and demonstrate an automated site-specific tip preparation method for APT.
  • To improve the throughput and reliability of APT sample preparation.
  • To enable precise control over the tip apex position for targeted analysis.

Main Methods:

  • Utilized a script-controlled focused ion beam (FIB) and scanning electron microscopy (SEM) dual-beam system.
  • Developed an automated procedure to detect tip shape and interface position.
  • Implemented algorithms for precise control of the tip apex location.

Main Results:

  • Successfully automated site-specific APT tip preparation.
  • Demonstrated the procedure on various material systems: Pt cap on Si, InGaN-based MQWs, and GaAs p-n junction.
  • Achieved precise control over the tip apex position, enabling targeted analysis.

Conclusions:

  • Automated site-specific tip preparation significantly enhances APT research efficiency and reliability.
  • The developed method allows for precise targeting of specific features or interfaces within a material.
  • This advancement facilitates more systematic and high-throughput APT studies.